Molecular beam generator using thermal decomposition for manufac

Details Molecular beam generator using thermal decomposition for manufac Molecular beam generator using thermal decomposition for manufac

1985-11-25

1987-10-13

Lawrence, Evan K.

Coating apparatus

Gas or vapor deposition

Multizone chamber

118722, 118724, 156DIG103, C23C 1652

Patent

active

046990836

ABSTRACT:
Arsine or phosphine are thermally decomposed to form a molecular beam of arsenic or phosphorous by using the inside surfaces of a thermal decomposition duct (11) made of quartz or of boron nitride and heated on the outside by radiation from a filament (30). Pierced internal partitions (6a, 6b, 6c, 6d) having successive circumferentially offset holes (6p, 6q, 6r, 6s) increase the decomposition surface area and prevent a molecule from passing through the duct along a straight line.

REFERENCES:
patent: 4522674 (1985-06-01), Ninomiya et al.
Journal of Applied Physics, vol. 55, No. 10, May 15, 1984, pp. 3571-3576, American Institute of Physics, N.Y., U.S.; M. B. Panish et al: "Gas Source Molecular Beam Epitaxy of GAxInl-xPyAsl-y", p. 3571, FIG. 1(b), p. 3572.

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