Alkali metal dispenser

Ampule tray for and method of precursor surface area

Apparatus and method for delivering reagents in vapor form to a

Apparatus and method of manufacturing semiconductor device

Apparatus and methods for chemical vapor deposition

Apparatus for coating a body by using ion plating

Apparatus for depositing a low work function material

Apparatus for depositing a thin layer on a substrate by laser pu

Apparatus for depositing an organic layer and method for...

Apparatus for depositing CdS and CdTe layers on substrates...

Apparatus for flash vaporization delivery of reagents

Apparatus for fluid delivery in chemical vapor deposition system

Apparatus for forming a film and an electroluminescence device

Apparatus for forming compound semiconductor thin-films

Apparatus for forming films by evaporation in vacuum

Apparatus for generating a wet oxygen stream for a...

Apparatus for generating raw material gas used in apparatus for

Apparatus for molecular beam epitaxy

Apparatus for the evaporative coating of substrates

Apparatus for vaporizing liquid raw material and apparatus for f