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Thermal physical vapor deposition source using pellets of...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Thin film forming apparatus using laser

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Thin film forming apparatus using laser

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Thin-film deposition evaporator

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Tool and method for in situ vapor phase deposition source...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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