Apparatus for vaporizing liquid raw material and apparatus for f

Details Apparatus for vaporizing liquid raw material and apparatus for f Apparatus for vaporizing liquid raw material and apparatus for f

1992-12-22

1995-06-06

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

392399, 261156, C23C 1600

Patent

active

054218950

ABSTRACT:
An apparatus for vaporizing a liquid raw material comprises a nozzle with an open tip end for ejecting a liquid raw material into a heated gas atmosphere as liquid droplets and a heated plate with a small opening disposed in front of the nozzle, a space opposite to that occupied by the nozzle with respect to the plate being evacuated.

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