4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure
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Head for vaporizing and flowing various precursor materials...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Heating crucible and deposition apparatus including the same

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Hydrophobic processing apparatus including a liquid delivery sys

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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