4. Coating apparatus
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Laser deposition apparatus for depositing a large area oxide thi

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Linear type deposition source

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Liquid delivery system comprising upstream pressure control...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Liquid delivery system, heater apparatus for liquid delivery sys

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Liquid material vaporization apparatus for semiconductor...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Liquid phosphorous precursor delivery apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Liquid reagent delivery system with constant thermal loading of

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Low-pressure CVD apparatus and method of manufacturing a...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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