Apparatus for forming a film and an electroluminescence device

Details Apparatus for forming a film and an electroluminescence device Apparatus for forming a film and an electroluminescence device

2004-04-19

2011-10-11

Moore, Karla (Department: 1716)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C118S719000

Reexamination Certificate

active

08034182

ABSTRACT:
A device having three evaporation sources and a unit for moving the respective evaporation sources in one chamber is used, whereby it becomes possible to increase efficiency of use of an evaporation material. Consequently, manufacturing cost can be reduced, and a uniform thickness can be obtained over an entire surface of a substrate even in the case in which a large area substrate is used.

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