4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure
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Ultra fine particle gas deposition apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Unibody crucible and effusion cell employing such a crucible

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Unibody crucible and effusion source employing such a crucible

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Unit for vaporizing liquid materials

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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