Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2006-08-31
2011-11-01
Chen, Keath (Department: 1716)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C323S280000
Reexamination Certificate
active
08048229
ABSTRACT:
An apparatus for depositing an organic layer and a method for controlling the heating unit thereof are provided. The apparatus includes a crucible positioned in a deposition chamber and containing materials for evaporation. The apparatus also includes a heating unit having first and second heat sources for heating the crucible. A housing isolates the heat emitted from the heating unit and an outer wall anchors the crucible. A nozzle sprays the materials evaporated from the crucible. The first and second heat sources are positioned on first and second sides of the crucible, respectively, and are independently controlled to minimize the time required to stabilize the deposition rate.
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Jeong Min Jae
Jeong Seok Heon
Kim Do Geun
Chen Keath
Christie Parker & Hale LLP
Samsung Mobile Display Co., Ltd.
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