Apparatus for the evaporative coating of substrates

Details Apparatus for the evaporative coating of substrates Apparatus for the evaporative coating of substrates

1993-01-21

1993-11-30

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118719, 392388, C23C 1426

Patent

active

052661172

ABSTRACT:
A vacuum chamber contains means for transferring a substrate for an information disc such as a CD from a loading station to a coating station, where material such as aluminum in wire form is evaporated in order to coat the substrate from above. An evaporation nozzle is continuously supplied with wire at a rate according to the coating thickness. The nozzle may be heated either resistively in order to evaporate the wire therein, or the wire may be directly heated by an induction coil.

REFERENCES:
patent: 4406252 (1983-09-01), Jones
patent: 4820106 (1989-04-01), Walde
patent: 5198272 (1993-03-01), Eisfeller

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