Apparatus and method for manufacturing planarized aluminum films

Apparatus and method for multi-target physical-vapor deposition

Apparatus and method for multi-target physical-vapor...

Apparatus and method for multiple ring sputtering from a single

Apparatus and method for obtaining symmetrical junctions...

Apparatus and method for physical vapor deposition using an...

Apparatus and method for reactive ion etching

Apparatus and method for reducing differential sputter rates

Apparatus and method for reducing redeposition in a physical...

Apparatus and method for selectively and controllably...

Apparatus and method for self-aligning a cover ring in a...

Apparatus and method for shielding a dielectric member to...

Apparatus and method for shielding a wafer holder

Apparatus and method for sputter depositing dielectric films...

Apparatus and method for sputtering

Apparatus and method for sputtering carbon

Apparatus and method for sputtering ionized material in a plasma

Apparatus and method for uniformly depositing thin films...

Apparatus and method for uniformly depositing thin films...

Apparatus and method for vacuum coating deposition