Apparatus and method for sputtering carbon

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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20419212, 20419216, 2041922, 20419222, 20419223, 20429808, 20429811, 20429826, C23C 1434, C23C 1435

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active

058303316

ABSTRACT:
A hydrogenated carbon film for magnetic thin film recording media is manufactured by alternating current magnetron sputtering in an atmosphere containing argon and a hydrocarbon gas. Targets mounted side-by-side cyclically sputter and discharge charge buildup according to an alternating current. Shielding between the targets directs electrons toward the anode at a given time.

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