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Reducing hillocking in aluminum layers formed on substrates

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Reducing particle generation during sputter deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Reflow chamber and process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Replicating method for surface finish inspection

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Resputtering to achieve better step coverage

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Resputtering to achieve better step coverage

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Resputtering to achieve better step coverage

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Reversing orientation of sputtering screen to avoid contaminatio

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Robotic apparatus for and method of manufacturing data storage d

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotatable magnetron including a replacement target structure

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotating cylindrical magnetron structure with self supporting zi

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotating film carrier and aperture for precision deposition...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotating magnet array and sputter source

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotating magnetron cathode and method for the use thereof

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotating pallet in sputtering system

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Rotating sputtering magnetron

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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