Rotating cylindrical magnetron structure with self supporting zi

Details Rotating cylindrical magnetron structure with self supporting zi Rotating cylindrical magnetron structure with self supporting zi

1991-05-21

1992-12-15

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, 20419229, 20429812, 20429813, 20429822, C23C 1435

Patent

active

051714116

ABSTRACT:
Alloys useful for preparing self-supporting cylindrical targets are provided. The alloys comprise zinc and one or more other metals chosen from the following: aluminum, bismuth, cerium, gadolinium, hafnium, niobium, silicon, tantalum, titanium, vanadium, yttrium, and zirconium. In one preferred embodiment, a zinc alloy with approximately 2% aluminum forms self-supporting cylindrical targets from which metal oxide films are prepared by reactive sputtering. The alloy oxide films are clear, transparent, non-absorbing, and optically functional.

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"ZA.RTM.-12 Bearing Stock" pamphlet published by Cominco Metals, a division of Cominco Ltd., Toronto, Canada.

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