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Method of processing a sample using a charged beam and reactive

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of processing a workpiece

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method of producing a cathode-ray tube and apparatus therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a cover layer of amorphous carbon on a subst

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a deposition film of composite material

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a magneto-optical disk

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a magneto-optical recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a photovoltaic device using a sputtering...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a piezoelectric thin film and bulk...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a resistance element for a resistance thermo

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a silicon/aluminum sputtering target

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a thin film by sputtering and an opposed tar

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a thin-film platinum...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing amorphous Co-Tb magnetic recording thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing amorphous silicon for hard mask and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing an electron beam emission cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing an optical component, and components formed

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing an optical information recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing electroluminescence emitting film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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