Method of producing a magneto-optical disk

Details Method of producing a magneto-optical disk Method of producing a magneto-optical disk

1992-03-03

1993-08-31

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419216, 20419223, C23C 1434

Patent

active

052405818

ABSTRACT:
Disclosed herein is a method of producing a magnetooptical disk by way of depositing a recording layer, a protective layer, and a reflection layer on a transparent substrate. The inventive method features that the refractive index of the protective layer is subjected to a precise control by way of changing the flow rate of argon gas within the range of no greater than 100 SCCM while maintaining the flow rate of nitrogen gas substantially constant at a value within the range of 3 to 10 SCCM.

REFERENCES:
patent: 4948482 (1990-08-01), Kobayashi et al.
patent: 4959136 (1990-09-01), Hatwar

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