Method of producing an electron beam emission cathode

Details Method of producing an electron beam emission cathode Method of producing an electron beam emission cathode

1990-10-15

1991-10-29

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C23C 1434

Patent

active

050613570

ABSTRACT:
A coating of lanthanum hexaboride LaB.sub.6 is sputtered on a substrate, preferably an electrically conductive substrate such as tungsten, in an insert gas atmosphere and at a pressure in the range of 2 to 50.times.10.sup.-3 torr. The coated substrate is subsequently heated to a temperature in the range of 750.degree. C. to 1000.degree. C. in a non-oxidizing atmosphere to provide an adherent, dense, smooth LaB.sub.6 coating on the substrate, suitable for use as an electron beam emission cathode.

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