Sputtering targets and method for the preparation thereof
Sputtering targets formed from cast materials
Sputtering targets having life alarm function
Sputtering targets of high-purity aluminum or alloy thereof
Sputtering unit
Sputtering-system baffle
Static continuous electrophoresis device
Stationary magnetron sputtering cathode for a vacuum coating app
Strippable radiation-cured coatings for optical fiber and method
Substance-sensitive electrical structures
Substrate carrier
Substrate clamp design for minimizing substrate to clamp stickin
Substrate holder, deposition method using substrate holder,...
Substrate holding device, substrate processing system and...
Substrate processing apparatus including wafer transporting and
Substrate processing apparatus with non-evaporable getter pump
Substrate processing system
Substrate support and lift apparatus and method
Substrate support with multilevel heat transfer mechanism
Substrate transfer apparatus of substrate processing system