Substrate processing apparatus with non-evaporable getter pump

Details Substrate processing apparatus with non-evaporable getter pump Substrate processing apparatus with non-evaporable getter pump

1996-06-20

1999-08-10

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429825, 20429833, 20429809, 20429811, 118715, 118719, 118724, 156345, 417 51, C23C 1434, C23C 1600

Patent

active

059353953

ABSTRACT:
An apparatus for processing a substrate includes at least one closed chamber for containing the substrate in a controlled environment, and a non-evaporable gettering material in the chamber acting as an internal pump serving as the primary pumping means for removing contaminants from the controlled environment. In this way the use of expensive and bulky cryogenic pumps can be avoided or minimized.

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Briesacher et al., "Non-Evaporable Getter Pumps for Semiconductor Processing Equipment," Department of Electronics, Faculty of Engineering, Tohoku University, vol. 1, No. 1, pp. 49-57, 1990.
Lorimer et al., "enhanced UHV Performances with Zirconium-Based Getter," Solid State Technology, pp. 77-80, Sep. 1990.
Briesacher et al. "Non-Evaporable Getter Pumps For Semiconductor Processing Equipment" 1990--Department of Electronics Faculty of Engineering, Tohoku University. vol. 1, No. 11, pp. 49-55.
Lorimar et al., "Enhanced UHV Performance With Zirconium-Based Getter", Solid State Technology, pp. 77-80 -Sep. 1990.
SAES Getters -SORB-AC Getter Wafer Modules and Panels.
SAES Getters -St 101 Non-Evaporable Getters.
SAES Getters -SAES Getters Group Bulletin -Mar. '93 No. 3.
SORB-AC Appendage Getter Pumps -SAES Getters.
SAES Vacuum Gauge -Wide Range Spinning Rotor Gauge.
Capacitorr -New High Capacity Non-Evaporable Getter Pump.

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