Substrate carrier

Details Substrate carrier Substrate carrier

2005-10-20

2011-12-27

Neckel, Alexa (Department: 1723)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C118S728000

Reexamination Certificate

active

08083912

ABSTRACT:
A carrier for a substrate, wherein at least a part of the carrier contains a material with a coefficient of thermal expansion which is higher than the coefficient of thermal expansion of the substrate, wherein in a specified region of the carrier a bar is centrally fastened whose coefficient of thermal expansion is lower than that of the region on which it is fastened.

REFERENCES:
patent: 6082298 (2000-07-01), Suter
patent: 6623563 (2003-09-01), Hosokawa
patent: 2005/0142290 (2005-06-01), Kempf et al.
patent: 684 602 (1994-10-01), None
patent: 413 95 49 (1993-06-01), None
patent: 44 25 874 (1996-01-01), None
patent: 102 11 827 (2003-10-01), None
patent: 1 536 456 (2005-06-01), None
patent: 57089464 (1982-06-01), None
patent: 04325679 (1992-11-01), None
patent: 05230651 (1993-09-01), None
patent: 07102366 (1995-04-01), None
patent: 09217173 (1997-08-01), None
patent: 9-291360 (1997-11-01), None
patent: 2000129441 (2000-05-01), None
patent: 2004-059990 (2004-02-01), None
patent: 2004211133 (2004-07-01), None
patent: 2006117995 (2006-05-01), None
patent: 525631 (2003-03-01), None
patent: 223242 (2005-05-01), None

Affiliated with

Also associated with

Rating

Substrate carrier does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate carrier, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate carrier will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4261930