Substrate holder, deposition method using substrate holder,...

Details Substrate holder, deposition method using substrate holder,... Substrate holder, deposition method using substrate holder,...

2011-04-19

2011-04-19

McDonald, Rodney G (Department: 1724)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C118S500000, C118S503000, C118S728000, C118S729000, C156S345510, C156S345540

Reexamination Certificate

active

07927473

ABSTRACT:
A substrate holder for supporting an insulating substrate includes a conductive substrate holder main body having an opening, a first support member formed to protrude inside the opening from the inner periphery of the opening, and including a clamping member which supports one end portion of the insulating substrate, and a second support member including a clamping member which supports the other end portion of the insulating substrate, and is movable so as to protrude inside the opening or retract from inside the opening.

REFERENCES:
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International Search Report of PC/TJP2008/073477 dated Mar. 24, 2009.
Non-English Written Opinion of the International Searching Authority PC/TJP2008/073477 dated Mar. 24, 2009.

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