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Sputtering target free of surface-deformed layers

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target having a shrink fit mounting ring

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target having an annular vault

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target material

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target of dielectrics having high strength and a...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target of single crystal aluminum alloy

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target producing few particles

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target producing very few particles, backing...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target supporting device

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target transport box

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target with a partially enclosed vault

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target with an insulating ring and a gap between...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target with grooves and intersecting channels

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target with machine readable indicia

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target wrench and sputtering target design

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target, A1 interconnection film, and electronic...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target, Al interconnection film, and electronic...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target, method for producing same, sputtering...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target, process for its production and film...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering target, transparent conductive oxide, and process...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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