Sputtering target transport box

Details Sputtering target transport box Sputtering target transport box

2011-01-18

2011-01-18

Neckel, Alexa D (Department: 1723)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C220S001600, C206S523000, C206S709000, C206S716000, C206S722000, C206S724000

Reexamination Certificate

active

07871505

ABSTRACT:
The present invention pertains to a sputtering target transport box having a void the size of a sputtering target, wherein supports for mechanical transport are provided to the bottom plate of the transport box, and a wheel for man-powered transport is provided to the edge portion of the bottom plate. Provided thereby is a sputtering target transport box in which the removal and transport of a sputtering target is easy, and which enables the transport of a sputtering target without causing any damage thereto.

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Japanese machine translation of the specification of JP 11011478 [Accessed on Mar. 3, 2008].
Patent Abstracts of Japan, 1 page English Abstract of JP 11-011478, Jan. 1999.
Patent Abstracts of Japan, 1 page English Abstract of JP 2000-079942, Mar. 2000.

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