Sputtering target wrench and sputtering target design

Details Sputtering target wrench and sputtering target design Sputtering target wrench and sputtering target design

1990-05-17

1991-07-16

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429818, C23C 1434

Patent

active

050322460

ABSTRACT:
A cathode sputtering mechanism is disclosed having a target nest and a target located within the target nest. The target nest includes a threaded internal peripheral surface which is complementary to external threads on the outer peripheral surface of the target. The target also includes a central opening having a tapered upwardly facing surface having apertures extending vertically into the tapered surface. A removal wrench includes a cylindrical ring having at its lower end a tapered surface which matches the tapered surface on the target. The wrench also includes torque pins extending into the tapered surface of the cylindrical ring which are disposed in complementary spacial relationship with the apertures in the target.

REFERENCES:
patent: 4100055 (1978-07-01), Rainey
patent: 4385979 (1983-05-01), Pierce et al.
patent: 4457825 (1984-07-01), Lamont, Jr.
patent: 4564435 (1986-01-01), Wickersham
patent: 4657654 (1987-04-01), Mintz
patent: 4668373 (1987-05-01), Rille et al.
patent: 4820397 (1989-04-01), Fielder et al.
patent: 4855033 (1989-08-01), Hurwitt
patent: 4885075 (1989-12-01), Hillman

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