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Integrated PVD system for aluminum hole filling using...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Integrated sputtering target assembly

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Integrated temperature control/alignment system for high perform

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Integrated temperature control/alignment system for high perform

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Interlocking cylindrical magnetron cathodes and targets

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Internally cooled target assembly for magnetron sputtering

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Inverted field circular magnetron sputtering device

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion beam processing system and ion beam processing method

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion exchange resin regeneration apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion generation apparatus and thin film forming apparatus and ion

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion mill shutter system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion milling apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion plating apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion sensor FET with surface treated metal gate

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion vapor deposition apparatus and method

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ion-permeable polymer joint for use in capillary electrophoresis

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ionization sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ionized physical vapor deposition apparatus using helical...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ionized physical vapor deposition method and apparatus with...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ionized PVD source to produce uniform low-particle deposition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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