4. Active solid-state devices (e.g., transistors, solid-state diode
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MEMS sensor and production method of MEMS sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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MEMS sensor and production method of MEMS sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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MEMS sensor comprising a deformation-free back electrode

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS structure having a blocked-sacrificial layer...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS structure support and release mechanism

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS structure with suspended microstructure that includes...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS switch and method for manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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MEMS switch having hexsil beam and method of integrating...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS thermal actuator and method of manufacture

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS variable capacitor with stabilized electrostatic drive...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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MEMS wafer level package

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS with flexible portions made of novel materials

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Mercury-based quaternary alloys of infrared sensitive materials

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
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Merged device with aligned trench fet and buried emitter pattern

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Having only two terminals and no control electrode – e.g.,...
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Merged field effect transistor cells for switching

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Merged FinFET P-channel/N-channel pair

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device
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Merged logic and memory combining thin film and bulk Si...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
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Merged MOS-bipolar capacitor memory cell

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Merged MOS-bipolar capacitor memory cell

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Merged MOS-bipolar capacitor memory cell

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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