MEMS structure having a blocked-sacrificial layer...

Details MEMS structure having a blocked-sacrificial layer... MEMS structure having a blocked-sacrificial layer...

2005-12-13

2005-12-13

Wille, Douglas A. (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S417000

Reexamination Certificate

active

06975010

ABSTRACT:
A fabrication method for a MEMS structure, the MEMS structure including a fixing portion fixed to the substrate and a floating portion floating above the substrate. A sacrificial layer deposited on the substrate is patterned to have a groove forming a space surrounding the area corresponding to the area in which the fixing portion is to be formed. If the MEMS structure is deposited on the sacrificial layer, a sidewall is formed inside the space and the fixing portion and the floating portion are formed on the sacrificial layer. If the sacrificial layer is removed using an etchant, the sacrificial layer at the bottom of the fixing portion is protected from the etchant by the sidewall and accordingly, the sacrificial layer except the area surrounded by the sidewall is removed. Therefore, only the sacrificial layer under the floating portion is removed. Because the connecting portion is fabricated to have the same thickness as the fixing portion and the floating portion, a strong/durable MEMS structure is provided. Additionally, the boundary between the fixing portion and the floating portion can be precisely determined, and adjustment of the length of the floating portion can be precisely controlled.

REFERENCES:
patent: 5756901 (1998-05-01), Kurle et al.
patent: 5970315 (1999-10-01), Carley et al.
patent: 6184052 (2001-02-01), Vigna et al.
patent: 0890978 (1999-01-01), None

Affiliated with

Also associated with

Rating

MEMS structure having a blocked-sacrificial layer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS structure having a blocked-sacrificial layer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS structure having a blocked-sacrificial layer... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3466449