Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2007-02-14
2009-11-24
Louie, Wai-Sing (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S108000, C257S428000, C257SE29324, C438S050000, C438S052000
Reexamination Certificate
active
07622783
ABSTRACT:
A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
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Carlson Gregory A.
Foster John S.
Gudeman Christopher S.
Rubel Paul J.
Innovative Micro Technology
Louie Wai-Sing
Spong Jaquelin K.
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