MEMS based RF components and a method of construction thereof
MEMS controlled oscillator
MEMS controlled oscillator
MEMS fabrication on a laminated substrate
MEMS millimeter wave switches
MEMS piezoelectric longitudinal mode resonator
MEMS resonator and method of making same
MEMS resonator array structure and method of operating and...
MEMS resonator array structure and method of operating and...
MEMS resonator devices with a plurality of mass elements...
MEMS resonator devices with a plurality of mass elements...
MEMS resonator having an inner element and an outer element...
MEMS resonator having at least one resonator mode shape
MEMS resonator including main and sub movable beams, and...
MEMS resonator, a method of manufacturing thereof, and a...
MEMS resonators and method for manufacturing MEMS resonators
MEMS resonators having resonator bodies therein with...
MEMS RF switch with low actuation voltage
MEMS switch
MEMS switch