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MEMS based RF components and a method of construction thereof

Wave transmission lines and networks – Long line elements and components – Waveguide elements and components
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MEMS controlled oscillator

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS controlled oscillator

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS fabrication on a laminated substrate

Wave transmission lines and networks – Long line elements and components – Switch
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MEMS millimeter wave switches

Wave transmission lines and networks – Plural channel systems – Having branched circuits
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MEMS piezoelectric longitudinal mode resonator

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator and method of making same

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator array structure and method of operating and...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator array structure and method of operating and...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator devices with a plurality of mass elements...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator devices with a plurality of mass elements...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator having an inner element and an outer element...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator having at least one resonator mode shape

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator including main and sub movable beams, and...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonator, a method of manufacturing thereof, and a...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonators and method for manufacturing MEMS resonators

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS resonators having resonator bodies therein with...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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MEMS RF switch with low actuation voltage

Wave transmission lines and networks – Plural channel systems – Having branched circuits
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MEMS switch

Wave transmission lines and networks – Plural channel systems – Having branched circuits
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MEMS switch

Wave transmission lines and networks – Plural channel systems – Having branched circuits
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