MEMS resonator devices with a plurality of mass elements...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C333S199000, C257S415000, C310S309000

Reexamination Certificate

active

08004372

ABSTRACT:
The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.

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