MEMS resonator devices with a plurality of mass elements...

Details MEMS resonator devices with a plurality of mass elements... MEMS resonator devices with a plurality of mass elements...

2011-08-23

2011-08-23

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S199000, C257S415000, C310S309000

Reexamination Certificate

active

08004372

ABSTRACT:
The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.

REFERENCES:
patent: 5226321 (1993-07-01), Varnham
patent: 6539804 (2003-04-01), Iwata
patent: 6570468 (2003-05-01), Ma et al.
patent: 6901799 (2005-06-01), Chen
patent: 7071793 (2006-07-01), Lutz et al.
patent: 7202761 (2007-04-01), Lutz et al.
patent: 7205867 (2007-04-01), Lutz et al.
patent: 7295088 (2007-11-01), Nguyen et al.
patent: 7323952 (2008-01-01), Pan et al.
patent: 7616077 (2009-11-01), Wittwer et al.
patent: 7633360 (2009-12-01), Weigold
patent: 7639104 (2009-12-01), Quevy et al.
patent: 2007/0103258 (2007-05-01), Weinstein et al.
patent: 2007/0188269 (2007-08-01), Lutz et al.
patent: 10152254 (2003-04-01), None
patent: 2007072409 (2007-06-01), None
patent: WO 2007/102130 (2007-09-01), None
German Office Action, Application No. 10 2010 000 818.4-54, dated Nov. 8, 2010, 4 pages.
Hopcroft et al., A High-Stability MEMS Frequency Reference, Transducers & Eurosensors 2007, 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, Jun. 10-14, 2007, pp. 1307-1309, IEEE (3 pages).
Hsu et al., Frequency Trimming for MEMS Resonator Oscillators, pp. 1088-1091, IEEE (4 pages), published in IEEE International Frequency Control Symposium; Geneva, Switzerland May 29-Jun. 1, 2007.
Kim et al., Si—SiO2 Composite MEMS Resonators in CMOS Compatible Wafer-scale Thin-Film Encapsulation; IEEE-FCS '07 Conference at Geneva, Switzerland, 2007, pp. 1214-1219, IEEE (6 pages), May 29-Jun. 1, 2007 Frequency Control Symposium.
Hopcroft et al., Temperature Compensation of a MEMS Resonator using Quality Factors as a Thermometer, MEMS 06, 2006, pp. 222-225, IEEE (4 pages), May 2006, 19th IEEE MEMS International Conference Istanbul, Turkey.
De et al., Theory of Thermoelastic Damping in Electrostatically Actuated Microstructures, Physical Review, Oct. 17, 2006, American Physical Society, pp. 144305-1-144305-13 (13 pages).

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