MEMS based RF components and a method of construction thereof

Details MEMS based RF components and a method of construction thereof MEMS based RF components and a method of construction thereof

2007-11-06

2007-11-06

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Waveguide elements and components

C333S108000

Reexamination Certificate

active

11039860

ABSTRACT:
A three dimensional waveguide is integrated with a MEMS structure to control a signal in various RF components. The components include switches, variable capacitors, filters and phase shifters. A controller controls movement of the MEMS structure to control a signal within the component. A method of construction and a method of operation of the component are described. The switches have high power handling capability and can be operated at high frequencies. By integrating a three dimensional waveguide with a MEMS structure, the components can be small in size with good operating characteristics.

REFERENCES:
patent: 6762661 (2004-07-01), Higgins

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