MEMS millimeter wave switches

Wave transmission lines and networks – Plural channel systems – Having branched circuits

Reexamination Certificate

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Details

C333S262000

Reexamination Certificate

active

06873223

ABSTRACT:
An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.

REFERENCES:
patent: 5619061 (1997-04-01), Goldsmith et al.
patent: 6218911 (2001-04-01), Kong et al.
patent: 20020000364 (2002-01-01), Hong et al.
patent: 100 31 569 (2001-02-01), None
patent: 0 887 879 (1998-12-01), None
Milanovic et al., “Microrelays for Batch Transfer Integration in RF Systems” MEMS2000. Micro Electro Mechanical Systems 2000. vol. 1, Jan. 23, 2000, pp. 787-792.
Yao J J et al., “A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC Up to 4 Ghz,” vol. 2, Jun. 25, 1995, pp. 384-387.
Charles L. Goldsmith et al., “Performance of Low-Loss RF MEMS Capacitive Switches,”IEEE Microwave and Guided Wave Letters, vol. 8, No. 8, Aug. 1998.
B. Pillans et al., “Ka-Band RF MEMS Phase Shifters,”IEEE Microwave and Guided Wave Letters, vol. 9, No. 12, Dec. 1999, pp. 520-522.

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