MEMS resonator having an inner element and an outer element...

Details MEMS resonator having an inner element and an outer element... MEMS resonator having an inner element and an outer element...

2006-09-27

2009-12-15

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S199000, C331S154000, C257S415000

Reexamination Certificate

active

07633360

ABSTRACT:
A MEMS resonator has an outer element having an inner surface, the inner surface defining an area and a inner element coupled to the outer element and disposed within the area. The MEMS resonator also has an actuation electrode, in communication with the outer element, for generating electrostatic signals that cause the inner element to flex in a periodic manner.

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