MEMS resonators having resonator bodies therein with...

Details MEMS resonators having resonator bodies therein with... MEMS resonators having resonator bodies therein with...

2009-09-30

2011-11-22

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S187000

Reexamination Certificate

active

08063720

ABSTRACT:
A microelectromechanical (MEMs) resonator includes a concave bulk acoustic resonator (CBAR). One embodiment of a CBAR includes a substrate and a resonator body suspended over the substrate by a pair of fixed supports that attach to first and second opposing ends of the resonator body. The resonator body has a first concave-shaped side extending between the first and second ends of the resonator body and a second concave-shaped side extending opposite the first concave-shaped side. The resonator body may be configured to have a minimum spacing of λ/2 between the first and second concave-shaped sides, where λ is a wavelength associated with a resonant frequency of said resonator body.

REFERENCES:
patent: 6630871 (2003-10-01), Ma et al.
patent: 6870444 (2005-03-01), Zurcher et al.
patent: 7176770 (2007-02-01), Ayazi et al.
patent: 7215061 (2007-05-01), Kihara et al.
patent: 2010/0060384 (2010-03-01), Taniguchi et al.
Ho et al. (2007) “High-Order Composite Bulk Acoustic Resonators”, School of Electrical and Computer Engineering, Georgia Institute for Technology, MEMS 2007, Kobe, Japan, Jan. 21-25, 2007, pp. 791-794.
Samarao et al. (2010) “Passive TCFCompensation in High Q Silicon Micromechanical Resonators”, IEEE International Conference on Micro Electro Mechanical Systems, Jan. 2010, pp. 116-119.
Samarao et al. (2010) “Intrinsic Temperature Compensation of Highly Resistive High-Q Silicon Microresonators Via Charge Carrier Depletion”, Frequency Control Symposium (FCS), 2010 IEEE International, Jun. 1-4, 2010, Newport Beach, California, pp. 334-339.

Affiliated with

Also associated with

Rating

MEMS resonators having resonator bodies therein with... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS resonators having resonator bodies therein with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS resonators having resonator bodies therein with... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4287981