Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2009-01-15
2011-10-18
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S199000, C257S415000, C310S309000
Reexamination Certificate
active
08040207
ABSTRACT:
The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.
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Nawaz Mohsin
Schoen Florian
Winkler Bernhard
Infineon - Technologies AG
Patterson Thuente Christensen Pedersen , P.A.
Summons Barbara
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