MEMS resonator, a method of manufacturing thereof, and a...

Details MEMS resonator, a method of manufacturing thereof, and a... MEMS resonator, a method of manufacturing thereof, and a...

2006-12-18

2011-11-15

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C438S050000, C438S386000, C438S426000, C331S1160FE, C331S154000, C310S309000

Reexamination Certificate

active

08058952

ABSTRACT:
The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.

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Yu-Wei, Lin; et al “Vibrating Micromechanical Resonators With Solid Dielectric Capacitive Transducer Gaps” Frequency Control Symposium and Exposition, 2005. Proceedings. Aug. 29, 2005, pp. 128-134.

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