MEMS resonator and method of making same

Details MEMS resonator and method of making same MEMS resonator and method of making same

2005-09-06

2005-09-06

Tokar, Michael (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S186000

Reexamination Certificate

active

06940370

ABSTRACT:
A MEMS resonater employs a bulk longitudinal resonating mass supported by opposing tethers above a substrate with primary capacitive plates spaced from end surfaces of the resonating mass and supported on the substrate. Any number of secondary capacitive plates can be spaced from side surfaces of the resonating mass for detecting transverse vibrations. The secondary capacitive plates can be shaped to conform to the mode of the transverse vibration. The sensor is readily fabricated using a two-mask self-aligned process, or a one-mask self-aligned process with timed etch.

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