MEMS resonator having at least one resonator mode shape

Details MEMS resonator having at least one resonator mode shape MEMS resonator having at least one resonator mode shape

2007-03-08

2010-11-23

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C438S050000, C438S386000, C310S309000, C331S154000

Reexamination Certificate

active

07839239

ABSTRACT:
The invention relates to a MEMS resonator having at least one mode shape comprising: a substrate (2) having a surface (12), and a resonator structure (1), wherein the resonator structure (1) is part of the substrate (2), characterized in that the resonator structure (1) is defined by a first closed trench (3) and a second closed trench (3), the first trench (3) being located inside the second trench (3) so as to form a tube structure (1) inside the substrate (2), and the resonator structure (1) being released from the substrate (2) only in directions parallel to the surface (12). The invention further relates to a method of manufacturing such a MEMS resonator.

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