MEMS resonator array structure and method of operating and...

Details MEMS resonator array structure and method of operating and... MEMS resonator array structure and method of operating and...

2011-03-15

2011-03-15

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000, C333S199000

Reexamination Certificate

active

07907035

ABSTRACT:
A MEMS array structure including a plurality of bulk mode resonators may include at least one resonator coupling section disposed between the plurality of bulk mode resonators. The plurality of resonators may oscillate by expansion and/or contraction in at least one direction/dimension. The MEMS array structure may include a plurality of sense electrodes and drive electrodes spaced apart from the plurality of bulk mode resonators by a gap. The MEMS array structure may further include at least one anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.

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