MEMS controlled oscillator

Details MEMS controlled oscillator MEMS controlled oscillator

2010-11-02

2011-11-01

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000

Reexamination Certificate

active

08049580

ABSTRACT:
An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.

REFERENCES:
patent: 2716887 (1955-09-01), Smith
patent: 4306456 (1981-12-01), Maerfeld
patent: 4355286 (1982-10-01), Knobbe et al.
patent: 4430895 (1984-02-01), Colton
patent: 4450377 (1984-05-01), Briese
patent: 4562740 (1986-01-01), Webber et al.
patent: 4598587 (1986-07-01), Dwyer et al.
patent: 4607341 (1986-08-01), Monchalin
patent: 5020370 (1991-06-01), Deval et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5063782 (1991-11-01), Kellett
patent: 5090254 (1992-02-01), Guckel et al.
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5352635 (1994-10-01), Tu et al.
patent: 5450751 (1995-09-01), Putty et al.
patent: 5719324 (1998-02-01), Thundat et al.
patent: 5804709 (1998-09-01), Bourgoin et al.
patent: 5839062 (1998-11-01), Nguyen et al.
patent: 5856722 (1999-01-01), Haronian et al.
patent: 5889357 (1999-03-01), Yachi et al.
patent: 5909456 (1999-06-01), Oka
patent: 6006593 (1999-12-01), Yamanaka
patent: 6035719 (2000-03-01), Toyota
patent: 6124933 (2000-09-01), Mizutani et al.
patent: 6134257 (2000-10-01), Capasso et al.
patent: 6363090 (2002-03-01), Wintner et al.
patent: 6369374 (2002-04-01), Greywall
patent: 6497141 (2002-12-01), Turner et al.
patent: 6628177 (2003-09-01), Clark et al.
patent: 6630871 (2003-10-01), Ma et al.
patent: 6788175 (2004-09-01), Prophet
patent: 6834064 (2004-12-01), Paschotta et al.
patent: 6859113 (2005-02-01), Giousouf et al.
patent: 6903489 (2005-06-01), Suzuki et al.
patent: 7215061 (2007-05-01), Kihara et al.
patent: 7654140 (2010-02-01), Zalalutdinov et al.
patent: 2003/0085779 (2003-05-01), Ma et al.
patent: 2003/0173864 (2003-09-01), Zalalutdinov et al.
patent: 2004/0055380 (2004-03-01), Shcheglov et al.
patent: 2005/0225413 (2005-10-01), Kozicki et al.
patent: 2006/0162455 (2006-07-01), Kawakatsu
patent: 2007/0200648 (2007-08-01), Reichenbach et al.
patent: 2007/0269901 (2007-11-01), Armani
patent: 2002229086 (2002-08-01), None
Zalalutdinov et al., Light-activated self-generation and parametric MEMS oscillators, Oct. 2001, SPIE vol. 4561, pp. 189-200.
“U.S. Appl. No. 10/097,178, Response filed Oct. 14, 2008 to Final Office Action mailed Jul. 17, 2008”, 9.
“U.S. Appl. No. 10/097,178, Supplemental Response filed Jan. 8, 2009 to Advisory Action mailed Nov. 24, 2008 and Final Office Action mailed Jul. 17, 2008”, 9.
“U.S. Appl. No. 10/097,178, Amendment and Response filed Feb. 19, 2008 to Office Action mailed Oct. 19, 2007.”, 10.
“U.S. Appl. No. 10/097,178 Response filed Jul. 29, 2009 to Office Action mailed Mar. 25, 2009.”, 12.
“U.S. Appl. No. 10/097,178, Non-Final Office Action mailed Mar. 25, 2009”, 12 pgs.
“U.S. Appl. No. 10/097,178, Notice of Allowance mailed Sep. 16, 2009”, 7 Pgs.
“U.S. Appl. No. 10/097,178, Response filed Jul. 29, 2009 to Non Final Office Action mailed Mar. 25, 2009”, 7 pgs.
“U.S. Appl. No. 11/598,097 Notice of Allowance mailed Jul. 26, 2010”, 6 pgs.
“U.S. Appl. No. 11/598,097, Non-Final Office Action mailed Mar. 10, 2009”, 12 pgs.
“U.S. Appl. No. 11/598,097, Non-Final Office Action mailed Aug. 6, 2009”, 9 PGS.
“U.S. Appl. No. 11/598,097, Non-Final Office Action mailed Jan. 19, 2010”, 8.
“U.S. Appl. No. 11/598,097, Response filed May 19, 2010 to Non Final Office Action mailed Jan. 19, 2010”, 7 pgs.
“U.S. Appl. No. 11/598,097, Response filed Jan. 12, 2009 to the Restriction Requirement mailed Dec. 12, 2009”, 6 pgs.
“U.S. Appl. No. 11/598,097, Response filed Dec. 3, 2009 to Non Final Office Action mailed Aug. 6, 2009”, 8 pgs.
“U.S. Appl. No. 11/598,097, Response filed Jun. 8, 2009 to Non Final Office Action mailed Mar. 10, 2009”, 8 pgs.
“U.S. Appl. No. 10/097,178, Final Office Action mailed Jul. 17, 2008”, 12 pgs.
“Non-Final Office Action mailed Oct. 19, 2007, in U.S. Appl. No. 10/097,178”, OARN, 10.
Carr, Dustin W, et al., “Measurement of mechanical resonance and losses in nanometer scale silicon wires”, Applied Physics Letters, 75(7), (Aug. 16, 1999), 920-922.
Carr, Dustin W, et al., “Parametric amplification in a torsional microresonator”, Applied Physics Letters, 77(10), (Sep. 4, 2000), 1545-1547.
Caves, Carlton M, “Quantum limits on noise in linear amplifiers”, Physical Review D (Particles and Fields), 26(8), (Oct. 15, 1982), 1817-1839.
Churenkov, A. V, “Photothermal excitation and self-excitation of silicon microresonators”, Sensors and Actuators A, 39(2), (Nov. 1993), 141-148.
Dilella, D., et al., “A micromachined magnetic-field sensor based on an electron tunneling displacement transducer”, Sensors and Actuators A, A86(1-2), (Oct. 30, 2000), 8-20.
Hsu, Wan-Thai, et al., “A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators”, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems, (Jan. 21-25, 2001), 349-352.
Ilic, B., “Mechanical resonant immunospecific biological detector”, Applied Physics Letters, 77(3), (2000), 450-452.
Liu, Cheng-Hsien, et al., “Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution”, Journal of Microelectromechanical Systems, 7(2), (1998), 235-244.
Lohndorf, Markus, et al., “Microcantilever torque magnetometry of thin magnetic films”, Journal of Applied Physics, 87(9), (May 1, 2000), 5995-5997.
Louisell, William H, “Coupled mode and parametric electronics”, John Wiley & Sons, Inc., New York, (1960).
Morse, Philip M, “Membranes and Plates”, in Vibration and Sound—2nd Edition, Chapter 5, McGraw-Hill Book Company, Inc., New York, (1948), 172-216.
Nguyen, Clark T.C, et al., “Tunable, Switchable, High-Q VHF Microelectromechanical Bandpass Filters”, 1999 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC. First Edition, (1999), 78-79.
Olkhovets, A., et al., “Non-Degenerate Nanomechanical Parametric Amplifier”, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems, (Jan. 21-25, 2001), 298-300.
Rugar, D., et al., “Mechanical parametric amplification and thermomechanical noise squeezing”, Physical Review Letters, 67(6), (2000), 699-702.
Sarid, D., In: Scanning Force Microscopy With Applications to Electric, Magnetic and Atomic Forces, Oxford University Press, New York, NY, (1994), 271.
Sidles, J. A, et al., Reviews of Modern Physics, 67(1), (1995), 249-265.
Stowe, T. D, et al., “Attonewton force detection using ultrathin silicon cantilevers”, Applied Physics Letters, 71(2), (Jul. 14, 1997), 288-290.
Timoshenko, S., et al., “Effect of Axial Force on Vibrations of Beams”, in Vibration Problems in Engineering, 4th Edition, John Wiley & Sons, New York, (1974), 453-455.
Zalalutdinov, M., “Frequency Entrainment for Micromechanical Oscillator”, Applied Physics Letters, 83(16), (Oct. 20, 2003), 3281-3283.
Zook

Affiliated with

Also associated with

Rating

MEMS controlled oscillator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS controlled oscillator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS controlled oscillator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4294885