MEMS piezoelectric longitudinal mode resonator

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C310S321000

Reexamination Certificate

active

07005946

ABSTRACT:
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.

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