Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2011-08-02
2011-08-02
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S188000, C310S309000, C331S156000, C331S17700V
Reexamination Certificate
active
07990233
ABSTRACT:
A MEMS resonator includes a main movable beam, at least one sub movable beam, and at least one exciting electrode. The main movable beam is electrically insulated from a substrate and fixed to at least one fixed end, the sub movable beam is formed to extend from the main movable beam, and the exciting electrode is provided to be close to the sub movable beam. The sub movable beam is excited by an electrostatic force to oscillate by exciting the exciting electrode using an alternating-current signal, such that the MEMS resonator resonates with at least one of a fundamental resonant frequency and harmonic frequencies thereof. The resonant frequency is changed by changing at least one of number of the at least one exciting electrode and a position of the exciting electrode relative to the sub movable beam.
REFERENCES:
patent: 5914553 (1999-06-01), Adams et al.
patent: 6490147 (2002-12-01), Yoon et al.
patent: 7741932 (2010-06-01), Nakamura et al.
patent: 2004/0061564 (2004-04-01), Photiadis et al.
patent: 2008/0047346 (2008-02-01), Vyas et al.
patent: 2008/0204153 (2008-08-01), Yoshida et al.
patent: 2009/0294638 (2009-12-01), Mohanty et al.
patent: 1 803 684 (2007-07-01), None
patent: 2006-005731 (2006-01-01), None
patent: 2006-524020 (2006-10-01), None
patent: 2007-184931 (2007-07-01), None
patent: 2004/095696 (2004-11-01), None
patent: WO 2006/013741 (2006-02-01), None
Makita et al.; “Silicon Fishbone-Shaped Resonant-Frequency-Tunable MEMS Resonator”; Microprocesses and Nanotechnology, 2007 Digest of Papers, pp. 500-501; Kyoto, Nov. 5-8, 2007.
Abstract and publication information from the IEEExplore website for the article “Silicon Fishbone-Shaped Resonant-Frequency-Tunable MEMS Resonator”, Kyoto, Nov. 5-8, 2007.
Kun Wang et al., “VHF Free-Free Beam High-Q Micromechanical Resonators”, Journal of Microelectromechanical Systems, vol. 9, No. 3, pp. 347-360, Sep. 2000.
Wan-Thai Hsu, “Vibrating RF MEMS for Timing and Frequency References”, Digests of IEEE MTT-S 2006 International Microwave Symposium, pp. 672-675, 2006.
Semiconductor Technology Academic Research Center
Summons Barbara
Wenderoth , Lind & Ponack, L.L.P.
LandOfFree
MEMS resonator including main and sub movable beams, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with MEMS resonator including main and sub movable beams, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS resonator including main and sub movable beams, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2772741