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Self aligned double patterning flow with non-sacrificial...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self aligned dual damascene method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self aligned dual damascene process and structure with low paras

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self aligned dual inlaid patterning and etching

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self aligned gate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self aligned gated Schottky diode guard ring structures

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Self aligned metal gates on high-k dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned metal interconnection and method of making the...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self aligned method for differential oxidation rate at...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Self aligned method of fabricating a DRAM with improved capacita

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor array of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method of forming non-volatile memory cells...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self aligned method to define features smaller than the resoluti

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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