Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1996-05-17
1999-08-31
Niebling, John F.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438254, 438396, 438397, H01L 218242
Patent
active
059465689
ABSTRACT:
A solid state memory fabrication method of DRAM chips with a self-alignment of field plate/BL isolation process includes using oxide-poly-oxide etch followed by oxidation or sidewall deposition (LPTEOS) to isolate the field plate and BL. This process uses a first etchant and a second etchant in etching the BL/N.sup.+ contact in the fabrication process. During the etch of BL/N.sup.+ contact (2C etch), a low selectivity etchant etches away Ploy-3 first. This first etchant is applied for approximately one hundred eighty seconds. And then a second etchant process is performed using a high Si selectivity etchant, which etches a way the residual oxide. The second etchant is applied for approximately ninety seconds. The exposed poly on the sidewall is isolated from the contact hole by oxidation or deposition (LPTEOS). The oxide formed on the substrate during oxidation is etched away by anisotropic etch. The self-alignment of BL/3P is thus achieved. The planar area of 2P can be increased by this method and not be limited by the overlap of 2C/3P.
REFERENCES:
patent: 4958318 (1990-09-01), Harari
patent: 5026657 (1991-06-01), Lee et al.
patent: 5538922 (1996-07-01), Cooper et al.
patent: 5565372 (1996-10-01), Kim
patent: 5580811 (1996-12-01), Kim
patent: 5792703 (1998-11-01), Bronner et al.
Hsiao Chia-Shun
Lin Wen-Jeng
Wang Chung-Chih
Wen Wei-Jing
Gurley Lynne A.
Mosel Vitelic Inc.
Niebling John F.
LandOfFree
Self aligned method of fabricating a DRAM with improved capacita does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Self aligned method of fabricating a DRAM with improved capacita, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self aligned method of fabricating a DRAM with improved capacita will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2428673