Three dimensional thin film devices and methods of fabrication

Three-dimensional force input control device and fabrication

Three-dimensional integrated CMOS-MEMS device and process...

Three-dimensional structural body composed of silicon fine...

Transducer having a resonating silicon beam and method for formi

Transducer having a silicon diaphragm and method for forming sam

Trilayered beam MEMS device and related methods

Triple layer isolation for silicon microstructure and...

Ultra thin surface mount wafer sensor structures and methods...

Ultrananocrystalline diamond cantilever wide dynamic range...

Use of sacrificial layers in the manufacture of high...

Vacuum packaged single crystal silicon device

Vacuum packaged single crystal silicon device

Vacuum-cavity MEMS resonator

Vibrating beam accelerometer and method for manufacturing...

Vibration gyro sensor and method for producing vibration...

Vibration sensor and method for manufacturing the vibration...

Wafer level package and method for making the same

Wafer process flow for a high performance MEMS accelerometer

Wafer-level packaging of electronic devices before singulation