Apparatus and method for interlocking a power supply to ion...

Details Apparatus and method for interlocking a power supply to ion... Apparatus and method for interlocking a power supply to ion...

2006-10-03

2006-10-03

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

Reexamination Certificate

active

07115490

ABSTRACT:
An apparatus and a method for interlocking power to ion implantation equipment. The apparatus may include a positive and a negative power supply which generates a positive voltage and a negative voltage respectively, a comparator which compares the positive voltage and the negative voltage, and a signal generating unit which generates an interlocking signal which interlocks the positive and negative power supplies when a sum of a first relative value of the positive voltage and a second relative value of the negative voltage does not equal zero. The apparatus may further include a switching unit which changes a mode of the positive and negative power supplies from a remote mode to a local mode when the sum of the relative values does not equal zero. The switching unit may be a relay switch. Power output lines may connect the positive and negative power sources to a lens assembly unit.

REFERENCES:
patent: 4008423 (1977-02-01), Christianson et al.
patent: 6300642 (2001-10-01), Cho et al.

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