Semiconductor-on-insulator structure fabrication having a...
Sequential deposition process for gap filling
Shallow trench filled with two or more dielectrics for...
Shallow trench filled with two or more dielectrics for...
Shallow trench filled with two or more dielectrics for...
Shallow trench isolation
Shallow trench isolation
Shallow trench isolation
Shallow trench isolation (STI) and method of forming the same
Shallow trench isolation (STI) fabrication method for semiconduc
Shallow trench isolation (STI) method employing gap filling sili
Shallow trench isolation (STI) method with reproducible...
Shallow trench isolation (STI) module to improve contact...
Shallow trench isolation (STI) region with high-K liner and...
Shallow trench isolation (STI) with bilayer of oxide-nitride for
Shallow trench isolation (STI) with trench liner of...
Shallow trench isolation and method of forming the same
Shallow trench isolation elevation uniformity via insertion...
Shallow trench isolation fill by liquid phase deposition of...
Shallow trench isolation for semiconductor devices