Trench isolation structure of a semiconductor device and a metho
Trench isolation structure partially bound between a pair of low
Trench planarization technique
Trench sidewall passivation for lateral RIE in a selective...
Trench transistor with localized source/drain regions implanted
Trench-diffusion corner rounding in a shallow-trench (STI) proce
Trench-diffusion corner rounding in a shallow-trench (STI)...
Tri-gate transistors and methods to fabricate same
Triple oxide fill for trench isolation
Two-step borophosphosilicate glass deposition process and...
Two-step, low argon, HDP CVD oxide deposition process
Ultra-thin resist shallow trench process using high...
Uniform recess depth of recessed resist layers in trench...
Use of an insulating spacer to prevent threshold voltage...
Use of polymer spacers for the fabrication of shallow trench iso
Vertically wired integrated circuit and method of fabrication
Wet etching method of removing silicon from a substrate and...
Wide neck shallow trench isolation region to prevent strain...
Wide neck shallow trench isolation region to prevent strain...