Shallow trench isolation (STI) method with reproducible...
Shallow trench isolation (STI) module to improve contact...
Shallow trench isolation (STI) region with high-K liner and...
Shallow trench isolation (STI) with bilayer of oxide-nitride for
Shallow trench isolation (STI) with trench liner of...
Shallow trench isolation and method of forming the same
Shallow trench isolation elevation uniformity via insertion...
Shallow trench isolation fill by liquid phase deposition of...
Shallow trench isolation for semiconductor devices
Shallow trench isolation for thin...
Shallow trench isolation formation with deep trench cap
Shallow trench isolation formation with improved trench edge oxi
Shallow trench isolation formation with ion implantation
Shallow trench isolation formation with reduced polish stop thic
Shallow trench isolation formation with sidewall spacer
Shallow trench isolation formation with simplified reverse plana
Shallow trench isolation formation with spacer-assisted ion impl
Shallow trench isolation formation with two source/drain...
Shallow trench isolation formation without planarization mask
Shallow trench isolation method