Copper damascene technology for ultra large scale...

Copper dendrite prevention by chemical removal of dielectric

Copper deposition for filling features in manufacture of...

Copper diffusion barrier

Copper diffusion barrier, aluminum wetting layer and...

Copper electrodeposition in microelectronics

Copper electroless deposition on a titanium-containing surface

Copper electromigration inhibition by copper alloy formation

Copper film selective formation method

Copper interconnect by immersion/electroless plating in dual...

Copper interconnect patterning

Copper interconnect structure and method of formation

Copper interconnect structure having stuffed diffusion barrier

Copper interconnect structure having stuffed diffusion barrier

Copper interconnect systems which use conductive,...

Copper interconnect systems which use conductive,...

Copper interconnect wiring and method of forming thereof

Copper interconnect with improved electromigration resistance

Copper interconnection structure incorporating a metal seed...

Copper interconnections for metal-insulator-metal capacitor...